Worldwide Service And Engineering of Semiconductor Production Equipment


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With this upgrade-retrofit kit, existing FSI Mercury MP systems can be upgraded to the current state of technology. 

This field service friendly PLC-upgrade is available for all FSI Mercury MP tools.

NON-CE (0106) / CE1 (0107) & CE2 (0113). 


Featuring powerful Omron Sysmac platform w/integrated SECS/GEM (HSMS) ,Custom-made direct drive servo motor, 

New main I/face PCB, IOT ready, Data gathering/monitoring (Merc-Dacq 2.0), 12" 24bit true color Touchscreen.


Easy import of existing process recipes,  advanced operator friendly HMI. 


Please feel free to contact us if you want more information about the possibilities for this modification/upgrade.

Phone:    +31 (0) 487 519 342

E-mail: or download brochure here